Use of Nickel and 316L Stainless Steel Filter Assemblies in High Purity Corrosive Gas Distribution Systems
نویسنده
چکیده
In addition to meeting the requirements of ultra high purity bulk gas distribution systems, the distribution of specialty and corrosive gases necessitates that the gas distribution system is corrosion resistant and does not exhibit any catalytic behavior. Vereecke1 and coworkers reported that reaction between reactive gases and materials of construction employed in gas delivery systems can result in the formation of corrosion by-products, which may contaminate the gas stream as both particles and volatile metal complexes, depending on their relative vapor pressure.
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